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Tuning of electrical properties of InxOy thin films grown by MOCVD for different applications

Wang, C. Y. / Cimalla, V. / Ambacher, O.

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Tuning of electrical properties of InxOy thin films grown by MOCVD for different applications

Wang, C. Y. / Cimalla, V. / Ambacher, O.

Tuning of electrical properties of InxOy thin films grown by MOCVD for different applications

Wang, C. Y. / Cimalla, V. / Ambacher, O.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Tuning of electrical properties of InxOy thin films grown by MOCVD for different applications

Contributors:

Wang, C. Y. (author) / Cimalla, V. (author) / Ambacher, O. (author)

Published in:

MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK ; 37 ; 945-946

Publication date:

2006-01-01

Size:

2 pages

ISSN:

0933-5137

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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