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Yield Property Characterization for Au and TiN Thin Films by Applying Nanoindentation Technique

Lee, Y. H. / Huh, Y. H. / Kim, J. Y. / Nahm, S. H. / Jang, J. I. / Kwon, D. I.

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Yield Property Characterization for Au and TiN Thin Films by Applying Nanoindentation Technique

Lee, Y. H. / Huh, Y. H. / Kim, J. Y. / Nahm, S. H. / Jang, J. I. / Kwon, D. I.

Yield Property Characterization for Au and TiN Thin Films by Applying Nanoindentation Technique

Lee, Y. H. / Huh, Y. H. / Kim, J. Y. / Nahm, S. H. / Jang, J. I. / Kwon, D. I.

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Document information

Title:

Yield Property Characterization for Au and TiN Thin Films by Applying Nanoindentation Technique

Contributors:

Lee, Y. H. (author) / Huh, Y. H. (author) / Kim, J. Y. (author) / Nahm, S. H. (author) / Jang, J. I. (author) / Kwon, D. I. (author) / Lee, S.-B. / Kim, Y.-J.

Published in:

Experimental Mechanics in Nano and Biotechnology ; 215-218

KEY ENGINEERING MATERIALS ; 326/328

Publication date:

2006-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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