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Nanomechanical properties of sub-10 nm carbon film overcoats using the nanoindentation technique

Yeo, C.-D. / Polycarpou, A. A. / Kiely, J. D. / Hsia, Y.-T.

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Nanomechanical properties of sub-10 nm carbon film overcoats using the nanoindentation technique

Yeo, C.-D. / Polycarpou, A. A. / Kiely, J. D. / Hsia, Y.-T.

Nanomechanical properties of sub-10 nm carbon film overcoats using the nanoindentation technique

Yeo, C.-D. / Polycarpou, A. A. / Kiely, J. D. / Hsia, Y.-T.

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Check availability in my library

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Document information

Title:

Nanomechanical properties of sub-10 nm carbon film overcoats using the nanoindentation technique

Contributors:

Yeo, C.-D. (author) / Polycarpou, A. A. (author) / Kiely, J. D. (author) / Hsia, Y.-T. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 22 ; 141-151

Publication date:

2007-01-01

Size:

11 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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