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    A Study of Double Sided Polishing Process for Ultra-Smooth Surface of Silicon Wafer

    New search for: Li, W.
    New search for: Hu, X. D.
    New search for: Jin, Y. F.
    New search for: Hu, G. X.
    New search for: Hu, X. Z.
    New search for: Jiang, C.
    New search for: Liu, G.
    New search for: Zhang, D.
    New search for: Xu, X.

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    A Study of Double Sided Polishing Process for Ultra-Smooth Surface of Silicon Wafer

    New search for: Li, W.
    New search for: Hu, X. D.
    New search for: Jin, Y. F.
    New search for: Hu, G. X.
    New search for: Hu, X. Z.
    New search for: Jiang, C.
    New search for: Liu, G.
    New search for: Zhang, D.
    New search for: Xu, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    A Study of Double Sided Polishing Process for Ultra-Smooth Surface of Silicon Wafer

    New search for: Li, W.
    New search for: Hu, X. D.
    New search for: Jin, Y. F.
    New search for: Hu, G. X.
    New search for: Hu, X. Z.
    New search for: Jiang, C.
    New search for: Liu, G.
    New search for: Zhang, D.
    New search for: Xu, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Title:

    A Study of Double Sided Polishing Process for Ultra-Smooth Surface of Silicon Wafer

    Contributors:

    Li, W. (author) / Hu, X. D. (author) / Jin, Y. F. (author) / Hu, G. X. (author) / Hu, X. Z. (author) / Jiang, C. / Liu, G. / Zhang, D. / Xu, X.

    Published in:

    Advances in Materials Manufacturing Science and Technology II ; 472-475

    MATERIALS SCIENCE FORUM ; 532/533

    Publication date:

    2007-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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