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Resonant capacitive MEMS acoustic emission transducers

Ozevin, D. / Greve, D. W. / Oppenheim, I. J. / Pessiki, S. P.

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Resonant capacitive MEMS acoustic emission transducers

Ozevin, D. / Greve, D. W. / Oppenheim, I. J. / Pessiki, S. P.

Resonant capacitive MEMS acoustic emission transducers

Ozevin, D. / Greve, D. W. / Oppenheim, I. J. / Pessiki, S. P.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Resonant capacitive MEMS acoustic emission transducers

Contributors:

Ozevin, D. (author) / Greve, D. W. (author) / Oppenheim, I. J. (author) / Pessiki, S. P. (author)

Published in:

SMART MATERIALS AND STRUCTURES ; 15 ; 1863-1871

Publication date:

2006-01-01

Size:

9 pages

ISSN:

0964-1726

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 530

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