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    Mode I and mixed mode fracture of polysilicon for MEMS:

    New search for: CHO, S. W.
    New search for: JONNALAGADDA, K.
    New search for: CHASIOTIS, I.

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    Mode I and mixed mode fracture of polysilicon for MEMS:

    New search for: CHO, S. W.
    New search for: JONNALAGADDA, K.
    New search for: CHASIOTIS, I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Mode I and mixed mode fracture of polysilicon for MEMS:

    New search for: CHO, S. W.
    New search for: JONNALAGADDA, K.
    New search for: CHASIOTIS, I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Mode I and mixed mode fracture of polysilicon for MEMS:

    Contributors:

    CHO, S. W. (author) / JONNALAGADDA, K. (author) / CHASIOTIS, I. (author)

    Published in:

    FATIGUE AND FRACTURE OF ENGINEERING MATERIALS AND STRUCTURES ; 30 ; 21-31

    Publication date:

    2007-01-01

    Size:

    11 pages

    ISSN:

    8756-758X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1123

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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