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    Single Diamond Dressing Characteristics of CMP Polyurethane Pad

    New search for: Liao, Y. S.
    New search for: Tsai, M. Y.
    New search for: Sung, J. C.
    New search for: Pai, Y. L.
    New search for: Guo, D.
    New search for: Kuriyagawa, T.
    New search for: Wang, J.
    New search for: Tamaki, J.

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    Single Diamond Dressing Characteristics of CMP Polyurethane Pad

    New search for: Liao, Y. S.
    New search for: Tsai, M. Y.
    New search for: Sung, J. C.
    New search for: Pai, Y. L.
    New search for: Guo, D.
    New search for: Kuriyagawa, T.
    New search for: Wang, J.
    New search for: Tamaki, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Single Diamond Dressing Characteristics of CMP Polyurethane Pad

    New search for: Liao, Y. S.
    New search for: Tsai, M. Y.
    New search for: Sung, J. C.
    New search for: Pai, Y. L.
    New search for: Guo, D.
    New search for: Kuriyagawa, T.
    New search for: Wang, J.
    New search for: Tamaki, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Single Diamond Dressing Characteristics of CMP Polyurethane Pad

    Contributors:

    Liao, Y. S. (author) / Tsai, M. Y. (author) / Sung, J. C. (author) / Pai, Y. L. (author) / Guo, D. / Kuriyagawa, T. / Wang, J. / Tamaki, J.

    Published in:

    Advances in Abrasive Technology IX ; 151-156

    KEY ENGINEERING MATERIALS ; 329

    Publication date:

    2007-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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