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Experimental and Simulation Research on Influence of Temperature on Nano-Scratching Process of Silicon Wafer
Experimental and Simulation Research on Influence of Temperature on Nano-Scratching Process of Silicon Wafer
Experimental and Simulation Research on Influence of Temperature on Nano-Scratching Process of Silicon Wafer
Okabe, H. (author) / Tsumura, T. (author) / Shimizu, J. (author) / Zhou, L. (author) / Eda, H. (author) / Guo, D. / Kuriyagawa, T. / Wang, J. / Tamaki, J.
2007-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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