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Low temperature processed hafnium oxide: Structural and electrical properties
Low temperature processed hafnium oxide: Structural and electrical properties
Low temperature processed hafnium oxide: Structural and electrical properties
Pereira, L. (author) / Barquinha, P. (author) / Fortunato, E. (author) / Martins, R. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 1125-1132
2006-01-01
8 pages
Article (Journal)
English
DDC:
621.38152
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Electrical Performances of Low Temperature Annealed Hafnium Oxide Deposited at Room Temperature
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