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A study of fused silica micro/nano patterning by focused-ion-beam
A study of fused silica micro/nano patterning by focused-ion-beam
A study of fused silica micro/nano patterning by focused-ion-beam
Li, W. (author) / Lalev, G. (author) / Dimov, S. (author) / Zhao, H. (author) / Pham, D. T. (author)
APPLIED SURFACE SCIENCE ; 253 ; 3608-3614
2007-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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