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A study of fused silica micro/nano patterning by focused-ion-beam
A study of fused silica micro/nano patterning by focused-ion-beam
A study of fused silica micro/nano patterning by focused-ion-beam
Li, W. (Autor:in) / Lalev, G. (Autor:in) / Dimov, S. (Autor:in) / Zhao, H. (Autor:in) / Pham, D. T. (Autor:in)
APPLIED SURFACE SCIENCE ; 253 ; 3608-3614
01.01.2007
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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