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Metal Plasma Source Ion Implantation Using a Pulsed Cathodic Are
Metal Plasma Source Ion Implantation Using a Pulsed Cathodic Are
Metal Plasma Source Ion Implantation Using a Pulsed Cathodic Are
Chun, S. Y. (author) / Yoon, D. Y. / Kang, S.-J. L. / Eun, K. Y. / Kim, Y.-S.
2007-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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