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Analysis of the processes of silicon epitaxial lateral overgrowth in Ar ambient gas

Jozwik, I. / Olchowik, J. M.

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Analysis of the processes of silicon epitaxial lateral overgrowth in Ar ambient gas

Jozwik, I. / Olchowik, J. M.

Analysis of the processes of silicon epitaxial lateral overgrowth in Ar ambient gas

Jozwik, I. / Olchowik, J. M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Analysis of the processes of silicon epitaxial lateral overgrowth in Ar ambient gas

Contributors:

Jozwik, I. (author) / Olchowik, J. M. (author)

Published in:

MATERIALS SCIENCE -WROCLAW- ; 24 ; 967-974

Publication date:

2006-01-01

Size:

8 pages

ISSN:

0137-1339

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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