Understanding deviations in lithographic patterns near interfaces: Characterization of bottom anti-reflective coatings (BARC) and the BARC-resist interface: Fid-Bau Portal

Understanding deviations in lithographic patterns near interfaces: Characterization of bottom anti-reflective coatings (BARC) and the BARC-resist interface

Lenhart, J. L. / Fischer, D. / Sambasivan, S. / Lin, E. K. / Wu, W. L. / Guerrero, D. J. / Wang, Y. / Puligadda, R.

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Understanding deviations in lithographic patterns near interfaces: Characterization of bottom anti-reflective coatings (BARC) and the BARC-resist interface

Lenhart, J. L. / Fischer, D. / Sambasivan, S. / Lin, E. K. / Wu, W. L. / Guerrero, D. J. / Wang, Y. / Puligadda, R.

Understanding deviations in lithographic patterns near interfaces: Characterization of bottom anti-reflective coatings (BARC) and the BARC-resist interface

Lenhart, J. L. / Fischer, D. / Sambasivan, S. / Lin, E. K. / Wu, W. L. / Guerrero, D. J. / Wang, Y. / Puligadda, R.

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Check availability in my library

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Title:

Understanding deviations in lithographic patterns near interfaces: Characterization of bottom anti-reflective coatings (BARC) and the BARC-resist interface

Contributors:

Lenhart, J. L. (author) / Fischer, D. (author) / Sambasivan, S. (author) / Lin, E. K. (author) / Wu, W. L. (author) / Guerrero, D. J. (author) / Wang, Y. (author) / Puligadda, R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 4166-4175

Publication date:

2007-01-01

Size:

10 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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