Understanding deviations in lithographic patterns near interfaces: Characterization of bottom anti-reflective coatings (BARC) and the BARC-resist interface: Fid-Bau Portal

Understanding deviations in lithographic patterns near interfaces: Characterization of bottom anti-reflective coatings (BARC) and the BARC-resist interface

Lenhart, J. L. / Fischer, D. / Sambasivan, S. / Lin, E. K. / Wu, W. L. / Guerrero, D. J. / Wang, Y. / Puligadda, R.

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Understanding deviations in lithographic patterns near interfaces: Characterization of bottom anti-reflective coatings (BARC) and the BARC-resist interface

Lenhart, J. L. / Fischer, D. / Sambasivan, S. / Lin, E. K. / Wu, W. L. / Guerrero, D. J. / Wang, Y. / Puligadda, R.

Understanding deviations in lithographic patterns near interfaces: Characterization of bottom anti-reflective coatings (BARC) and the BARC-resist interface

Lenhart, J. L. / Fischer, D. / Sambasivan, S. / Lin, E. K. / Wu, W. L. / Guerrero, D. J. / Wang, Y. / Puligadda, R.

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Titel:

Understanding deviations in lithographic patterns near interfaces: Characterization of bottom anti-reflective coatings (BARC) and the BARC-resist interface

Beteiligte:

Lenhart, J. L. (Autor:in) / Fischer, D. (Autor:in) / Sambasivan, S. (Autor:in) / Lin, E. K. (Autor:in) / Wu, W. L. (Autor:in) / Guerrero, D. J. (Autor:in) / Wang, Y. (Autor:in) / Puligadda, R. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 253 ; 4166-4175

Erscheinungsdatum:

01.01.2007

Format / Umfang:

10 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

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