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TiNi Shape Memory Alloys for MEMS: Thin Film Deposition, Thermophysical Properties and Laser Micromachining Characteristics
TiNi Shape Memory Alloys for MEMS: Thin Film Deposition, Thermophysical Properties and Laser Micromachining Characteristics
TiNi Shape Memory Alloys for MEMS: Thin Film Deposition, Thermophysical Properties and Laser Micromachining Characteristics
Davies, S. T. (author) / Chandra, T. / Tsuzaki, K. / Militzer, M. / Ravindran, C.
2007-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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