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Internal structure transition of spin-on glass by electron beam irradiation
Internal structure transition of spin-on glass by electron beam irradiation
Internal structure transition of spin-on glass by electron beam irradiation
Araki, M. (author) / Taniguchi, J. (author) / Sawada, N. (author) / Utsumi, T. (author) / Miyamoto, I. (author)
APPLIED SURFACE SCIENCE ; 253 ; 5191-5195
2007-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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