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Atomic layer deposition of PbZrO3 thin films

Harjuoja, J. / Vayrynen, S. / Putkonen, M. / Niinisto, L. / Rauhala, E.

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Atomic layer deposition of PbZrO3 thin films

Harjuoja, J. / Vayrynen, S. / Putkonen, M. / Niinisto, L. / Rauhala, E.

Atomic layer deposition of PbZrO3 thin films

Harjuoja, J. / Vayrynen, S. / Putkonen, M. / Niinisto, L. / Rauhala, E.

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Check availability in my library

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Document information

Title:

Atomic layer deposition of PbZrO3 thin films

Contributors:

Harjuoja, J. (author) / Vayrynen, S. (author) / Putkonen, M. (author) / Niinisto, L. (author) / Rauhala, E. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 5228-5232

Publication date:

2007-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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