Accurate detection of interface between SiO2 film and Si substrate: Fid-Bau Portal

Accurate detection of interface between SiO2 film and Si substrate

Qian, H. X. / Zhou, W. / Li, X. M. / Miao, J. M. / Lim, L. E.

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Accurate detection of interface between SiO2 film and Si substrate

Qian, H. X. / Zhou, W. / Li, X. M. / Miao, J. M. / Lim, L. E.

Accurate detection of interface between SiO2 film and Si substrate

Qian, H. X. / Zhou, W. / Li, X. M. / Miao, J. M. / Lim, L. E.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Accurate detection of interface between SiO2 film and Si substrate

Contributors:

Qian, H. X. (author) / Zhou, W. (author) / Li, X. M. (author) / Miao, J. M. (author) / Lim, L. E. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 5511-5515

Publication date:

2007-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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