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Fabrication of nano-porous silicon oxide layers by plasma polymerisation methods
Fabrication of nano-porous silicon oxide layers by plasma polymerisation methods
Fabrication of nano-porous silicon oxide layers by plasma polymerisation methods
Chifen, A. N. (author) / Knoll, W. (author) / Förch, R. (author)
MATERIALS LETTERS ; 61 ; 1722-1724
2007-01-01
3 pages
Article (Journal)
English
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