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Plasma Immersion Ion Implantation of Nitrogen into Porous Silicon Layers

Manuaba, A. / Pinter, I. / Szilagyi, E. / Battistig, G. / Ortega, C. / Grosman, A. / Amsel, G.

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Plasma Immersion Ion Implantation of Nitrogen into Porous Silicon Layers

Manuaba, A. / Pinter, I. / Szilagyi, E. / Battistig, G. / Ortega, C. / Grosman, A. / Amsel, G.

Plasma Immersion Ion Implantation of Nitrogen into Porous Silicon Layers

Manuaba, A. / Pinter, I. / Szilagyi, E. / Battistig, G. / Ortega, C. / Grosman, A. / Amsel, G.

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Document information

Title:

Plasma Immersion Ion Implantation of Nitrogen into Porous Silicon Layers

Contributors:

Manuaba, A. (author) / Pinter, I. (author) / Szilagyi, E. (author) / Battistig, G. (author) / Ortega, C. (author) / Grosman, A. (author) / Amsel, G. (author) / Balogh, A. G. / Walter, G.

Published in:

Materials Science Applications of Ion Beam Techniques ; 233-236

MATERIALS SCIENCE FORUM ; 248/249

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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