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    Effect of Laser Parameters in the Micromachining of Silicon by Femtosecond Pulse Laser

    New search for: Geng, N.
    New search for: Fu, X.
    New search for: Li, H. X.
    New search for: Ni, X. C.
    New search for: Hu, X. T.
    New search for: Dong, S.
    New search for: Yao, Y.

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    Effect of Laser Parameters in the Micromachining of Silicon by Femtosecond Pulse Laser

    New search for: Geng, N.
    New search for: Fu, X.
    New search for: Li, H. X.
    New search for: Ni, X. C.
    New search for: Hu, X. T.
    New search for: Dong, S.
    New search for: Yao, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of Laser Parameters in the Micromachining of Silicon by Femtosecond Pulse Laser

    New search for: Geng, N.
    New search for: Fu, X.
    New search for: Li, H. X.
    New search for: Ni, X. C.
    New search for: Hu, X. T.
    New search for: Dong, S.
    New search for: Yao, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    Effect of Laser Parameters in the Micromachining of Silicon by Femtosecond Pulse Laser

    Contributors:

    Geng, N. (author) / Fu, X. (author) / Li, H. X. (author) / Ni, X. C. (author) / Hu, X. T. (author) / Dong, S. / Yao, Y.

    Published in:

    Progress of Precision Engineering and Nano Technology Selected Papers from Proceeding of the First International Conference on Precision Engineering and Micro/Nano Technology in Asia November 12-14, 2005, Shenzhen, China ; 136-140

    KEY ENGINEERING MATERIALS ; 339

    Publication date:

    2007-01-01

    Size:

    5 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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