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Influence of acetylene to argon flow rate ratios on structure and properties of hydrogenated amorphous carbon films produced on steel substrates by plasma immersion ion implantation and deposition
Influence of acetylene to argon flow rate ratios on structure and properties of hydrogenated amorphous carbon films produced on steel substrates by plasma immersion ion implantation and deposition
Influence of acetylene to argon flow rate ratios on structure and properties of hydrogenated amorphous carbon films produced on steel substrates by plasma immersion ion implantation and deposition
Xu, M. (author) / Cai, X. (author) / Chen, Q. (author) / Zhao, J. (author) / Chu, P. K. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 22 ; 982-988
2007-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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