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Ellipsometric study of crystalline silicon hydrogenated by plasma immersion ion implantation
Ellipsometric study of crystalline silicon hydrogenated by plasma immersion ion implantation
Ellipsometric study of crystalline silicon hydrogenated by plasma immersion ion implantation
Szekeres, A. (author) / Alexandrova, S. (author) / Petrik, P. (author) / Fodor, B. (author) / Bakalova, S. (author)
APPLIED SURFACE SCIENCE ; 281 ; 105-108
2013-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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