Synthesis and electrochemical characteristics of Ta-N thin films fabricated by cathodic arc deposition: Fid-Bau Portal

Synthesis and electrochemical characteristics of Ta-N thin films fabricated by cathodic arc deposition

Li, L. / Niu, E. / Lv, G. / Zhang, X. / Chen, H. / Fan, S. / Liu, C. / Yang, S. Z.

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Synthesis and electrochemical characteristics of Ta-N thin films fabricated by cathodic arc deposition

Li, L. / Niu, E. / Lv, G. / Zhang, X. / Chen, H. / Fan, S. / Liu, C. / Yang, S. Z.

Synthesis and electrochemical characteristics of Ta-N thin films fabricated by cathodic arc deposition

Li, L. / Niu, E. / Lv, G. / Zhang, X. / Chen, H. / Fan, S. / Liu, C. / Yang, S. Z.

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Document information

Title:

Synthesis and electrochemical characteristics of Ta-N thin films fabricated by cathodic arc deposition

Contributors:

Li, L. (author) / Niu, E. (author) / Lv, G. (author) / Zhang, X. (author) / Chen, H. (author) / Fan, S. (author) / Liu, C. (author) / Yang, S. Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 6811-6816

Publication date:

2007-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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