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AFM Simulation for a Nano-abrasive Micro-wear on the Silicon

An, W. / Wang, C. / Zhao, Y.-w.

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AFM Simulation for a Nano-abrasive Micro-wear on the Silicon

An, W. / Wang, C. / Zhao, Y.-w.

AFM Simulation for a Nano-abrasive Micro-wear on the Silicon

An, W. / Wang, C. / Zhao, Y.-w.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

AFM Simulation for a Nano-abrasive Micro-wear on the Silicon

Contributors:

An, W. (author) / Wang, C. (author) / Zhao, Y.-w. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 25 ; 273-275

Publication date:

2007-01-01

Size:

3 pages

ISSN:

1004-793X

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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