Analytical and Experimental Study of Mismatch Strain-Induced Microcantilever Behavior During Deposition: Fid-Bau Portal

Analytical and Experimental Study of Mismatch Strain-Induced Microcantilever Behavior During Deposition

Kim, S.-H. / Boyd, J. G.

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Analytical and Experimental Study of Mismatch Strain-Induced Microcantilever Behavior During Deposition

Kim, S.-H. / Boyd, J. G.

Analytical and Experimental Study of Mismatch Strain-Induced Microcantilever Behavior During Deposition

Kim, S.-H. / Boyd, J. G.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Analytical and Experimental Study of Mismatch Strain-Induced Microcantilever Behavior During Deposition

Contributors:

Kim, S.-H. (author) / Boyd, J. G. (author)

Published in:

JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 21 ; 415-420

Publication date:

2007-01-01

Size:

6 pages

ISSN:

1738-494X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621

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