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Laser induced backside dry etching of transparent materials
Laser induced backside dry etching of transparent materials
Laser induced backside dry etching of transparent materials
Hopp, B. (author) / Vass, C. (author) / Smausz, T. (author)
APPLIED SURFACE SCIENCE ; 253 ; 7922-7925
2007-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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