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Laser etching of transparent materials at a backside surface adsorbed layer
Laser etching of transparent materials at a backside surface adsorbed layer
Laser etching of transparent materials at a backside surface adsorbed layer
Bohme, R. (author) / Hirsch, D. (author) / Zimmer, K. (author)
APPLIED SURFACE SCIENCE ; 252 ; 4763-4767
2006-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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