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    Pulsed laser deposition of aluminum nitride thin films for FBAR applications

    New search for: Cibert, C.
    New search for: Chatras, M.
    New search for: Champeaux, C.
    New search for: Cros, D.
    New search for: Catherinot, A.

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    Pulsed laser deposition of aluminum nitride thin films for FBAR applications

    New search for: Cibert, C.
    New search for: Chatras, M.
    New search for: Champeaux, C.
    New search for: Cros, D.
    New search for: Catherinot, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Pulsed laser deposition of aluminum nitride thin films for FBAR applications

    New search for: Cibert, C.
    New search for: Chatras, M.
    New search for: Champeaux, C.
    New search for: Cros, D.
    New search for: Catherinot, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Pulsed laser deposition of aluminum nitride thin films for FBAR applications

    Contributors:

    Cibert, C. (author) / Chatras, M. (author) / Champeaux, C. (author) / Cros, D. (author) / Catherinot, A. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 253 ; 8151-8154

    Publication date:

    2007-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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