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Aluminum nitride thin films grown by plasma-assisted pulsed laser deposition

Ogawa, T. / Ooakmoto, M. / Mori, Y. / Sasaki, T.

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Aluminum nitride thin films grown by plasma-assisted pulsed laser deposition

Ogawa, T. / Ooakmoto, M. / Mori, Y. / Sasaki, T.

Aluminum nitride thin films grown by plasma-assisted pulsed laser deposition

Ogawa, T. / Ooakmoto, M. / Mori, Y. / Sasaki, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Aluminum nitride thin films grown by plasma-assisted pulsed laser deposition

Contributors:

Ogawa, T. (author) / Ooakmoto, M. (author) / Mori, Y. (author) / Sasaki, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 113/114 ; 57-60

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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