Influence of in situ nitrogen pressure on crystallization of pulsed laser deposited AlN films: Fid-Bau Portal

Influence of in situ nitrogen pressure on crystallization of pulsed laser deposited AlN films

Bakalova, S. / Szekeres, A. / Cziraki, A. / Lungu, C. P. / Grigorescu, S. / Socol, G. / Axente, E. / Mihailescu, I. N.

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Influence of in situ nitrogen pressure on crystallization of pulsed laser deposited AlN films

Bakalova, S. / Szekeres, A. / Cziraki, A. / Lungu, C. P. / Grigorescu, S. / Socol, G. / Axente, E. / Mihailescu, I. N.

Influence of in situ nitrogen pressure on crystallization of pulsed laser deposited AlN films

Bakalova, S. / Szekeres, A. / Cziraki, A. / Lungu, C. P. / Grigorescu, S. / Socol, G. / Axente, E. / Mihailescu, I. N.

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Title:

Influence of in situ nitrogen pressure on crystallization of pulsed laser deposited AlN films

Contributors:

Bakalova, S. (author) / Szekeres, A. (author) / Cziraki, A. (author) / Lungu, C. P. (author) / Grigorescu, S. (author) / Socol, G. (author) / Axente, E. (author) / Mihailescu, I. N. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 8215-8219

Publication date:

2007-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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