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Surface microstructuring of silica glass by laser-induced backside wet etching with a DPSS UV laser
Surface microstructuring of silica glass by laser-induced backside wet etching with a DPSS UV laser
Surface microstructuring of silica glass by laser-induced backside wet etching with a DPSS UV laser
Niino, H. (author) / Kawaguchi, Y. (author) / Sato, T. (author) / Narazaki, A. (author) / Kurosaki, R. (author)
APPLIED SURFACE SCIENCE ; 253 ; 8287-8291
2007-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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