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Nanohole processing on silicon substrate by femtosecond laser pulse with localized surface plasmon polariton
Nanohole processing on silicon substrate by femtosecond laser pulse with localized surface plasmon polariton
Nanohole processing on silicon substrate by femtosecond laser pulse with localized surface plasmon polariton
Atanasov, P. A. (author) / Takada, H. (author) / Nedyalkov, N. N. (author) / Obara, M. (author)
APPLIED SURFACE SCIENCE ; 253 ; 8304-8308
2007-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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