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Femtosecond pulse laser processing of TiN on silicon

Bonse, J. / Rudolph, P. / Kruger, J. / Baudach, S. / Kautek, W.

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Femtosecond pulse laser processing of TiN on silicon

Bonse, J. / Rudolph, P. / Kruger, J. / Baudach, S. / Kautek, W.

Femtosecond pulse laser processing of TiN on silicon

Bonse, J. / Rudolph, P. / Kruger, J. / Baudach, S. / Kautek, W.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Femtosecond pulse laser processing of TiN on silicon

Contributors:

Bonse, J. (author) / Rudolph, P. (author) / Kruger, J. (author) / Baudach, S. (author) / Kautek, W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 154-155 ; 659-663

Publication date:

2000-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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