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Post-Implantation Annealing of SiC: Relevance of the Heating Rate
Post-Implantation Annealing of SiC: Relevance of the Heating Rate
Post-Implantation Annealing of SiC: Relevance of the Heating Rate
Nipoti, R. (author) / Wright, N. / Johnson, C. M. / Vassilevski, K. / Nikitina, I. / Horsfall, A.
2007-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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