Post-Implantation Annealing of Aluminum in 6H-SiC: Fid-Bau Portal

Post-Implantation Annealing of Aluminum in 6H-SiC

Ottaviani, L. / Planson, D. / Locatelli, M. L. / Chante, J. P. / Canut, B. / Ramos, S.

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Post-Implantation Annealing of Aluminum in 6H-SiC

Ottaviani, L. / Planson, D. / Locatelli, M. L. / Chante, J. P. / Canut, B. / Ramos, S.

Post-Implantation Annealing of Aluminum in 6H-SiC

Ottaviani, L. / Planson, D. / Locatelli, M. L. / Chante, J. P. / Canut, B. / Ramos, S.

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Document information

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Document information

Title:

Post-Implantation Annealing of Aluminum in 6H-SiC

Contributors:

Ottaviani, L. (author) / Planson, D. (author) / Locatelli, M. L. (author) / Chante, J. P. (author) / Canut, B. (author) / Ramos, S. (author)

Published in:

MATERIALS SCIENCE FORUM ; 264/268 ; 709-712

Publication date:

1998-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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