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Encapsulating Annealing of N^+ Implanted 4H-SiC by Diamond-Like-Carbon Film

Miyagawa, S. / Suzuki, T. / Kudo, T. / Satoh, M.

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Encapsulating Annealing of N^+ Implanted 4H-SiC by Diamond-Like-Carbon Film

Miyagawa, S. / Suzuki, T. / Kudo, T. / Satoh, M.

Encapsulating Annealing of N^+ Implanted 4H-SiC by Diamond-Like-Carbon Film

Miyagawa, S. / Suzuki, T. / Kudo, T. / Satoh, M.

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Document information

Title:

Encapsulating Annealing of N^+ Implanted 4H-SiC by Diamond-Like-Carbon Film

Contributors:

Miyagawa, S. (author) / Suzuki, T. (author) / Kudo, T. (author) / Satoh, M. (author) / Wright, N. / Johnson, C. M. / Vassilevski, K. / Nikitina, I. / Horsfall, A.

Published in:

Silicon Carbide and Related Materials 2006 ; 583-586

MATERIALS SCIENCE FORUM ; 556/557

Publication date:

2007-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Doll, G. L. / Heremans, J. P. / Perry, T. A. et al. | British Library Online Contents | 1994

Diamond growth on carbon-implanted silicon

Deguchi, M. / Kitabatake, M. / Hirao, T. et al. | British Library Online Contents | 1992

Formation of diamond-like carbon bonds by pulsed electron beam annealing of microcrystalline carbon-copper bilayer film systems

Burkhard, G. / Tamura, H. / Tanabe, Y. et al. | British Library Online Contents | 1994

Diamond-like amorphous carbon

Robertson, J. | British Library Online Contents | 2002

Characterization of the Diamond-like Carbon Based Functionalloy Gradient Film

Ma, F. / Cai, X. / Li, G. et al. | British Library Online Contents | 2002