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    Exploitation of atomic layer deposition for nanostructured materials

    New search for: Leskelä, M.
    New search for: Kemell, M.
    New search for: Kukli, K.
    New search for: Pore, V.
    New search for: Santala, E.
    New search for: Ritala, M.
    New search for: Lu, J.

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    Exploitation of atomic layer deposition for nanostructured materials

    New search for: Leskelä, M.
    New search for: Kemell, M.
    New search for: Kukli, K.
    New search for: Pore, V.
    New search for: Santala, E.
    New search for: Ritala, M.
    New search for: Lu, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Exploitation of atomic layer deposition for nanostructured materials

    New search for: Leskelä, M.
    New search for: Kemell, M.
    New search for: Kukli, K.
    New search for: Pore, V.
    New search for: Santala, E.
    New search for: Ritala, M.
    New search for: Lu, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Exploitation of atomic layer deposition for nanostructured materials

    Contributors:

    Leskelä, M. (author) / Kemell, M. (author) / Kukli, K. (author) / Pore, V. (author) / Santala, E. (author) / Ritala, M. (author) / Lu, J. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 27 ; 1504-1508

    Publication date:

    2007-01-01

    Size:

    5 pages

    ISSN:

    0928-4931

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 660

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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