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Exploitation of atomic layer deposition for nanostructured materials
Exploitation of atomic layer deposition for nanostructured materials
Exploitation of atomic layer deposition for nanostructured materials
Leskelä, M. (author) / Kemell, M. (author) / Kukli, K. (author) / Pore, V. (author) / Santala, E. (author) / Ritala, M. (author) / Lu, J. (author)
MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 27 ; 1504-1508
2007-01-01
5 pages
Article (Journal)
English
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