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    Selective electroplating of copper lines on pre-patterned tantalum oxide thin films

    New search for: El-Sayed, H.
    New search for: Greiner, M. T.
    New search for: Kruse, P.

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    Selective electroplating of copper lines on pre-patterned tantalum oxide thin films

    New search for: El-Sayed, H.
    New search for: Greiner, M. T.
    New search for: Kruse, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Selective electroplating of copper lines on pre-patterned tantalum oxide thin films

    New search for: El-Sayed, H.
    New search for: Greiner, M. T.
    New search for: Kruse, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Selective electroplating of copper lines on pre-patterned tantalum oxide thin films

    Contributors:

    El-Sayed, H. (author) / Greiner, M. T. (author) / Kruse, P. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 253 ; 8962-8968

    Publication date:

    2007-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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