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Selective electroplating of copper lines on pre-patterned tantalum oxide thin films
Selective electroplating of copper lines on pre-patterned tantalum oxide thin films
Selective electroplating of copper lines on pre-patterned tantalum oxide thin films
El-Sayed, H. (Autor:in) / Greiner, M. T. (Autor:in) / Kruse, P. (Autor:in)
APPLIED SURFACE SCIENCE ; 253 ; 8962-8968
01.01.2007
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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