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Correlation between substrate bias, growth process and structural properties of phosphorus incorporated tetrahedral amorphous carbon films
Correlation between substrate bias, growth process and structural properties of phosphorus incorporated tetrahedral amorphous carbon films
Correlation between substrate bias, growth process and structural properties of phosphorus incorporated tetrahedral amorphous carbon films
APPLIED SURFACE SCIENCE ; 253 ; 9124-9129
2007-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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