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Correlation between substrate bias, growth process and structural properties of phosphorus incorporated tetrahedral amorphous carbon films

Liu, A. / Zhu, J. / Han, J. / Wu, H. / Jia, Z.

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Correlation between substrate bias, growth process and structural properties of phosphorus incorporated tetrahedral amorphous carbon films

Liu, A. / Zhu, J. / Han, J. / Wu, H. / Jia, Z.

Correlation between substrate bias, growth process and structural properties of phosphorus incorporated tetrahedral amorphous carbon films

Liu, A. / Zhu, J. / Han, J. / Wu, H. / Jia, Z.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Correlation between substrate bias, growth process and structural properties of phosphorus incorporated tetrahedral amorphous carbon films

Contributors:

Liu, A. (author) / Zhu, J. (author) / Han, J. (author) / Wu, H. (author) / Jia, Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 9124-9129

Publication date:

2007-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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