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Peculiarities of Formula Not Shown thermal oxidation

Balitskii, O. A. / Savchyn, V. P.

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Peculiarities of Formula Not Shown thermal oxidation

Balitskii, O. A. / Savchyn, V. P.

Peculiarities of Formula Not Shown thermal oxidation

Balitskii, O. A. / Savchyn, V. P.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Peculiarities of Formula Not Shown thermal oxidation

Contributors:

Balitskii, O. A. (author) / Savchyn, V. P. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 10 ; 124-127

Publication date:

2007-01-01

Size:

4 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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