Structural study of nanoporous ultra low-k dielectrics using complementary techniques: Ellipsometric porosimetry, X-ray reflectivity and grazing incidence small-angle X-ray scattering: Fid-Bau Portal

Structural study of nanoporous ultra low-k dielectrics using complementary techniques: Ellipsometric porosimetry, X-ray reflectivity and grazing incidence small-angle X-ray scattering

Jousseaume, V. / Rolland, G. / Babonneau, D. / Simon, J. P.

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Structural study of nanoporous ultra low-k dielectrics using complementary techniques: Ellipsometric porosimetry, X-ray reflectivity and grazing incidence small-angle X-ray scattering

Jousseaume, V. / Rolland, G. / Babonneau, D. / Simon, J. P.

Structural study of nanoporous ultra low-k dielectrics using complementary techniques: Ellipsometric porosimetry, X-ray reflectivity and grazing incidence small-angle X-ray scattering

Jousseaume, V. / Rolland, G. / Babonneau, D. / Simon, J. P.

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Check availability in my library

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Document information

Title:

Structural study of nanoporous ultra low-k dielectrics using complementary techniques: Ellipsometric porosimetry, X-ray reflectivity and grazing incidence small-angle X-ray scattering

Contributors:

Jousseaume, V. (author) / Rolland, G. (author) / Babonneau, D. (author) / Simon, J. P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 473-479

Publication date:

2007-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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