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Light absorptive underlayer enhanced excimer-laser crystallization of Si thin-film

Yeh, W. / Ke, D. / Zhuang, C. / Huang, H. / Yang, Y.

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Light absorptive underlayer enhanced excimer-laser crystallization of Si thin-film

Yeh, W. / Ke, D. / Zhuang, C. / Huang, H. / Yang, Y.

Light absorptive underlayer enhanced excimer-laser crystallization of Si thin-film

Yeh, W. / Ke, D. / Zhuang, C. / Huang, H. / Yang, Y.

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Document information

Title:

Light absorptive underlayer enhanced excimer-laser crystallization of Si thin-film

Contributors:

Yeh, W. (author) / Ke, D. (author) / Zhuang, C. (author) / Huang, H. (author) / Yang, Y. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 22 ; 2973-2981

Publication date:

2007-01-01

Size:

9 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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