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Excimer laser crystallization techniques for polysilicon TFTs

Fortunato, G. / Mariucci, L. / Carluccio, R. / Pecora, A. / Foglietti, V.

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Excimer laser crystallization techniques for polysilicon TFTs

Fortunato, G. / Mariucci, L. / Carluccio, R. / Pecora, A. / Foglietti, V.

Excimer laser crystallization techniques for polysilicon TFTs

Fortunato, G. / Mariucci, L. / Carluccio, R. / Pecora, A. / Foglietti, V.

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Check availability in my library

Order at Subito €

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Document information

Title:

Excimer laser crystallization techniques for polysilicon TFTs

Contributors:

Fortunato, G. (author) / Mariucci, L. (author) / Carluccio, R. (author) / Pecora, A. (author) / Foglietti, V. (author)

Published in:

APPLIED SURFACE SCIENCE ; 154-155 ; 95-104

Publication date:

2000-01-01

Size:

10 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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