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In situ etch rate measurements of thin film combinatorial libraries
In situ etch rate measurements of thin film combinatorial libraries
In situ etch rate measurements of thin film combinatorial libraries
Perkins, J. D. (author) / van Hest, M. F. (author) / Teplin, C. W. (author) / Dabney, M. S. (author) / Ginley, D. S. (author)
APPLIED SURFACE SCIENCE ; 254 ; 687-691
2007-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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