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In-situ thin film growth/etch measurement and control by laser light reflectance analysis

Singh, B.P.

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In-situ thin film growth/etch measurement and control by laser light reflectance analysis

Singh, B.P.

In-situ thin film growth/etch measurement and control by laser light reflectance analysis

Singh, B.P.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

In-situ thin film growth/etch measurement and control by laser light reflectance analysis

Contributors:

Singh, B.P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 150 ; 95-100

Publication date:

1999-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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