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    Ultra-Large Area RF Plasma Sources Employing Multiple Low-Inductance Internal-Antenna Modules for Flat Panel Display Processing

    New search for: Setsuhara, Y.
    New search for: Takenaka, K.
    New search for: Tsukiyama, D.
    New search for: Nishisaka, K.
    New search for: Ebe, A.
    New search for: Chang, Y.W.
    New search for: Kim, N.J.
    New search for: Lee, C.S.

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    Ultra-Large Area RF Plasma Sources Employing Multiple Low-Inductance Internal-Antenna Modules for Flat Panel Display Processing

    New search for: Setsuhara, Y.
    New search for: Takenaka, K.
    New search for: Tsukiyama, D.
    New search for: Nishisaka, K.
    New search for: Ebe, A.
    New search for: Chang, Y.W.
    New search for: Kim, N.J.
    New search for: Lee, C.S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Ultra-Large Area RF Plasma Sources Employing Multiple Low-Inductance Internal-Antenna Modules for Flat Panel Display Processing

    New search for: Setsuhara, Y.
    New search for: Takenaka, K.
    New search for: Tsukiyama, D.
    New search for: Nishisaka, K.
    New search for: Ebe, A.
    New search for: Chang, Y.W.
    New search for: Kim, N.J.
    New search for: Lee, C.S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Ultra-Large Area RF Plasma Sources Employing Multiple Low-Inductance Internal-Antenna Modules for Flat Panel Display Processing

    Contributors:

    Setsuhara, Y. (author) / Takenaka, K. (author) / Tsukiyama, D. (author) / Nishisaka, K. (author) / Ebe, A. (author) / Chang, Y.W. / Kim, N.J. / Lee, C.S.

    Published in:

    PRICM 6: Selected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, November 5-9, 2007, ICC Jeju, Jeju Island, Korea ; 1237-1240

    MATERIALS SCIENCE FORUM ; 561/565

    Publication date:

    2007-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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