Effect of hydrogen annealing on characteristics of polycrystalline silicon: Fid-Bau Portal

Effect of hydrogen annealing on characteristics of polycrystalline silicon

Gou, X. / Xu, Y. / Li, X. / Heng, Y. / Ma, L. / Ren, B.

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Effect of hydrogen annealing on characteristics of polycrystalline silicon

Gou, X. / Xu, Y. / Li, X. / Heng, Y. / Ma, L. / Ren, B.

Effect of hydrogen annealing on characteristics of polycrystalline silicon

Gou, X. / Xu, Y. / Li, X. / Heng, Y. / Ma, L. / Ren, B.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effect of hydrogen annealing on characteristics of polycrystalline silicon

Contributors:

Gou, X. (author) / Xu, Y. (author) / Li, X. (author) / Heng, Y. (author) / Ma, L. (author) / Ren, B. (author)

Published in:

RARE METALS -BEIJING- ENGLISH EDITION ; 25 ; 173-175

Publication date:

2006-01-01

Size:

3 pages

ISSN:

1001-0521

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 669

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